Correlation between the surface characteristics and the duty cycle for the PACVD derived TiN nanostructured films

M. Raoufi, Sh. Mirdamadi, F. Mahboubi, Sh. Ahangarani, M.S. Mahdipoor, H. Elmkhah
Surface and Coatings Technology, Volume 205, Issues 21-22, 25, Pages 4980-4984
2011
 

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